Mks Astron 2l Manual [2021] Info

: Once the plasma is ignited, the primary process gas (typically cap N cap F sub 3 ) can be introduced, and the can be removed. Process Parameters Flow Rates : Post-ignition flow typically supports up to (standard liters per minute) of cap N cap F sub 3 Operating Pressure

: Minimum 2.0 gpm during operation; 0.5 gpm during idle. Temperature : Maximum inlet temperature of Gas Connections : Uses ISO KF40 connections for both inlet and outlet. mks astron 2l manual

: MKS recommends against unauthorized modifications. Critical components like plasma blocks and electronic circuit boards (Power, Control, Ignition) should be serviced via the MKS Refurbishment Program . Purchasing and Availability : Once the plasma is ignited, the primary

Have a specific question about your MKS Astron 2L? Drop a comment below or check the MKS Facebook group for direct support from the community! : MKS recommends against unauthorized modifications